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Patents |
Issued US Patents |
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1. US Patent 6,124,650, Non-volatile MEMS micro-relays using magnetic actuators
2. US Patent 6,355,498, Thin film resonators fabricated on membranes created by front side releasing
3. US Patent 6,400,009, Hermetic firewall for MEMS packaging in flip-chip bonded geometry
4. US Patent 6,522,801, Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
5. US Patent 6,728,281, Quantum-dot photon turnstile device
6. US Patent 6,823,101, Method for calibrating a MEMS device
7. US Patent 6,911,913, Piezo-resistive sensing of mirror position in an optical switch
8. US Patent 6,922,499, MEMS Driver circuit arrangement |
